The IEEE International Conference on Micro Electro Mechanical Systems (MEMS) covers areas such as:
Fabrication technologies and processes
Design, simulation and analysis tools with experimental verification
Electro-mechanical integration techniques
Silicon and non-silicon materials
Metrology and operational evaluation techniques
Assembly and packaging approaches
System architecture
Past Events
IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012) - 29 Jan - 02 Feb, 2012, Paris Marriott Rive Gauche Hotel & Conference Center, France (17952)
IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011) - 23-27 Jan 2011, Hilton Cancun Golf and Spa Resort, Mexico (8668)
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - 24-28 Jan 2010, Hong Kong Convention and Exhibition Centre (HKCEC) (438)
Important
Please, check "IEEE International Conference on Micro Electro Mechanical Systems (MEMS)" official website for possible changes, before making any traveling arrangements
